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Handbook of semiconductor wafer cleaning technology : science, technology, and applications / edited by Werner Kern.

By: Contributor(s): Material type: TextSeries: Materials science and process technology seriesPublication details: Park Ridge, N.J., U.S.A. : Noyes Publications,1993. c1993.Description: xx, 623 p. : ill. ; 25 cmISBN:
  • 0815513313 :
Subject(s): DDC classification:
  • 621.38152 SEM
Online resources: Catalogued by: Sara
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Cover image Item type Current library Home library Collection Shelving location Call number Materials specified Vol info URL Copy number Status Notes Date due Barcode Item holds Item hold queue priority Course reserves
NB - Book (Non borrowing) Central Library First floor 621.38152SEM (Browse shelf(Opens below)) Not for loan 000011066
Total holds: 0

Distributer: Al-Ahram

Includes bibliographical references and index.

Catalogued by: Sara

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