Handbook of semiconductor wafer cleaning technology : science, technology, and applications / (Record no. 9409)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00921nac a22002291u 4500 |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 93004078 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0815513313 : |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | SEM |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (OCLC) | |
| -- | 9409 |
| -- | 9409 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | 20080729 |
| 245 00 - TITLE STATEMENT | |
| Title | Handbook of semiconductor wafer cleaning technology : science, technology, and applications / |
| Statement of responsibility, etc | edited by Werner Kern. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Park Ridge, N.J., U.S.A. : |
| Name of publisher, distributor, etc | Noyes Publications,1993. |
| Date of publication, distribution, etc | c1993. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xx, 623 p. : |
| Other physical details | ill. ; |
| Dimensions | 25 cm. |
| 440 #0 - | |
| -- | Materials science and process technology series. |
| 500 ## - GENERAL NOTE | |
| General note | Distributer: Al-Ahram |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Includes bibliographical references and index. |
| 511 ## - PARTICIPANT OR PERFORMER NOTE | |
| Participant or performer note | Catalogued by: Sara |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Semiconductor wafers |
| General subdivision | Cleaning. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kern, Werner, |
| Dates associated with a name | 1925- |
| 856 42 - ELECTRONIC LOCATION AND ACCESS | |
| Materials specified | Publisher description |
| Uniform Resource Identifier | <a href="http://www.loc.gov/catdir/description/wap041/93004078.html">http://www.loc.gov/catdir/description/wap041/93004078.html</a> |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Item type | NB - Book (Non borrowing) |
| Call number prefix | 621.38152SEM |
| Withdrawn status | Item status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Total Checkouts | Full call number | Barcode | Date last seen | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Central Library | Central Library | First floor | 08/05/2008 | Purchase | 621.38152SEM | 000011066 | 15/07/2025 | NB - Book (Non borrowing) |