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Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz.

By: Contributor(s): Material type: TextPublication details: Chichester, England ; New York : Wiley, c1998. c1998.Description: 2 v. : ill. ; 24 cmISBN:
  • 0471966819 (v. 1 : alk. paper)
  • 0471966827 (v. 2 : alk. paper)
  • 0471980846 (set : alk. paper)
Subject(s): DDC classification:
  • 621.38152 CAM
Online resources:
Contents:
v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.
Catalogued By: Mahitab.
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Holdings
Cover image Item type Current library Home library Collection Shelving location Call number Materials specified Vol info URL Copy number Status Notes Date due Barcode Item holds Item hold queue priority Course reserves
Book - Borrowing Central Library First floor 621.38152CAM (Browse shelf(Opens below)) Available 000008027
Total holds: 0

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Distributer: Al-Ahram.

Includes bibliographical references and index.

v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.

Catalogued By: Mahitab.

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