Semiconductor micromachining / (Record no. 6703)

MARC details
000 -LEADER
fixed length control field 01220nac a22003011u 4500
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 97026052
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0471966819 (v. 1 : alk. paper)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0471966827 (v. 2 : alk. paper)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0471980846 (set : alk. paper)
035 ## - SYSTEM CONTROL NUMBER
System control number (DLC) 97026052
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152
Item number CAM
090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (OCLC)
-- 6703
-- 6703
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Campbell, S.A. [ed.]
245 00 - TITLE STATEMENT
Title Semiconductor micromachining /
Statement of responsibility, etc edited by S.A. Campbell, H.J. Lewerenz.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Chichester, England ;
-- New York :
Name of publisher, distributor, etc Wiley, c1998.
Date of publication, distribution, etc c1998.
300 ## - PHYSICAL DESCRIPTION
Extent 2 v. :
Other physical details ill. ;
Dimensions 24 cm.
500 ## - GENERAL NOTE
General note Distributer: Al-Ahram.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references and index.
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.
511 ## - PARTICIPANT OR PERFORMER NOTE
Participant or performer note Catalogued By: Mahitab.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Semiconductors
General subdivision Design and construction.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Micromachining.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Microfabrication.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Lewerenz, H.- J.
856 42 - ELECTRONIC LOCATION AND ACCESS
Materials specified Publisher description
Uniform Resource Identifier <a href="http://www.loc.gov/catdir/description/wiley033/97026052.html">http://www.loc.gov/catdir/description/wiley033/97026052.html</a>
856 42 - ELECTRONIC LOCATION AND ACCESS
Materials specified Table of Contents
Uniform Resource Identifier <a href="http://www.loc.gov/catdir/toc/onix03/97026052.html">http://www.loc.gov/catdir/toc/onix03/97026052.html</a>
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Item type Book - Borrowing
Call number prefix 621.38152CAM
Holdings
Withdrawn status Item status Damaged status Not for loan Home library Current library Shelving location Date acquired Source of acquisition Total Checkouts Full call number Barcode Date last seen Koha item type
        Central Library Central Library First floor 29/11/2007 Purchase   621.38152CAM 000008027 15/07/2025 Book - Borrowing

© BUE Library 2020