| 000 | 00921nac a22002291u 4500 | ||
|---|---|---|---|
| 010 | _a 93004078 | ||
| 020 | _a0815513313 : | ||
| 082 | 0 | 0 |
_a621.38152 _bSEM |
| 090 |
_c9409 _d9409 |
||
| 100 | _a20080729 | ||
| 245 | 0 | 0 |
_aHandbook of semiconductor wafer cleaning technology : science, technology, and applications / _cedited by Werner Kern. |
| 260 |
_aPark Ridge, N.J., U.S.A. : _bNoyes Publications,1993. _cc1993. |
||
| 300 |
_axx, 623 p. : _bill. ; _c25 cm. |
||
| 440 | 0 | _aMaterials science and process technology series. | |
| 500 | _aDistributer: Al-Ahram | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 511 | _aCatalogued by: Sara | ||
| 650 | 0 |
_aSemiconductor wafers _xCleaning. |
|
| 700 | 1 |
_aKern, Werner, _d1925- |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wap041/93004078.html |
| 942 |
_cNB _k621.38152SEM |
||
| 999 |
_c9409 _d9409 |
||