000			01334nac a22003251i 4500
003			EG-ScBUE
005			20250427102518.0
008			250413s2001 nyua f b 001 0 eng d
020			_a0471241415 (cloth : alk. paper)
020			_a9780471241416
040			_aEG-ScBUE _beng _erda _cEG-ScBUE _dEG-ScBUE
082	0	4	_a530.4275 _bINS _222
245	0	0	_aIn situ real-time characterization of thin films / _bedited by Orlando Auciello, Alan R. Krauss, Argonne National Laboratory, Argonne, Illinois.
264		1	_aNew York : _bJohn Wiley & Sons, Inc., _c[2001]
264		4	_cc2001
300			_axi, 263 pages : _billustrations ; _c25 cm
336			_2rdacontent _atext _btxt
337			_aunmediated _2rdamedia _bn
338			_avolume _bnc _2rdacarrier
500			_a"A Wiley-Interscience publication."
504			_aIncludes bibliographical references and index.
650		7	_aThin films. _2BUEsh
655			_vReading book
700	1		_aAuciello, Orlando, _d1945-, _4editor.
700	1		_aKrauss, Alan Robert, _eeditor.
856	4	2	_3Contributor biographical information _uhttp://www.loc.gov/catdir/bios/wiley043/00025162.html
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley035/00025162.html
856	4	2	_3Table of Contents _uhttp://www.loc.gov/catdir/toc/onix06/00025162.html
942			_cBB _2ddc
999			_c9090 _d9090