| 000 | 00922nac a22002411u 4500 | ||
|---|---|---|---|
| 008 | 150901b xxu||||| |||| 00| 0 eng d | ||
| 010 | _a 2005050111 | ||
| 020 | _a0849391377 (alk. paper) | ||
| 082 | 0 | 0 |
_a621.381 _bMEM _222 |
| 245 | 0 | 0 |
_aMEMS : _bintroduction and fundamentals / _cedited by Mohamed Gad-El-Hak. |
| 260 |
_aBoca Raton : _bCRC/Taylor & Francis, _c2006. |
||
| 300 |
_a1 v. (various pagings) : _bill. ; _c26 cm. |
||
| 490 | 1 | _aMechanical engineering series | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems. _2BUEsh |
|
| 650 | 0 |
_aMicroelectronics. _2BUEsh |
|
| 650 | 0 |
_aNanotechnology. _2BUEsh |
|
| 651 | _2BUEsh | ||
| 700 | 1 |
_aGad-el-Hak, Mohamed, _d1945- |
|
| 830 | 0 | _aMechanical engineering series (Boca Raton, Fla.) | |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0653/2005050111-d.html |
| 942 |
_cBB _k621.381 _2ddc |
||
| 999 |
_c8001 _d1982 |
||