| 000 | 00943nac a22002171u 4500 | ||
|---|---|---|---|
| 090 | _c7969 | ||
| 008 | 090203t2006 xxu||||| |||| 00| 0 eng d | ||
| 010 | _a2005048932 | ||
| 020 | _a0131472860 | ||
| 035 | _a(OCoLC)ocm60550857 | ||
| 082 | 0 | 0 |
_a621.3 _bLIU |
| 100 | _aLiu, Chang, | ||
| 245 | 1 | 0 |
_aFoundations of MEMS / _cChang Liu. |
| 260 |
_aUpper Saddle River, NJ : _bPearson/Prentice Hall, _cc2006. |
||
| 300 |
_axxii, 530 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 942 |
_cBB _k621.3LIU _2ddc |
||
| 999 |
_c7969 _d7969 |
||