000			01220nac a22003011u 4500
010			_a 97026052
020			_a0471966819 (v. 1 : alk. paper)
020			_a0471966827 (v. 2 : alk. paper)
020			_a0471980846 (set : alk. paper)
035			_a(DLC) 97026052
082	0	0	_a621.38152 _bCAM
090			_c6703 _d6703
100			_aCampbell, S.A. [ed.]
245	0	0	_aSemiconductor micromachining / _cedited by S.A. Campbell, H.J. Lewerenz.
260			_aChichester, England ; _aNew York : _bWiley, c1998. _cc1998.
300			_a2 v. : _bill. ; _c24 cm.
500			_aDistributer: Al-Ahram.
504			_aIncludes bibliographical references and index.
505	0		_av. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.
511			_aCatalogued By: Mahitab.
650		0	_aSemiconductors _xDesign and construction.
650		0	_aMicromachining.
650		0	_aMicrofabrication.
700	1		_aLewerenz, H.- J.
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley033/97026052.html
856	4	2	_3Table of Contents _uhttp://www.loc.gov/catdir/toc/onix03/97026052.html
942			_cBB _k621.38152CAM
999			_c6703 _d6703