000			01965cas a2200397 a 4500
001			11334157
005			20040118185306.0
008			860109d198619uupauar1p 1 a0eng d
010			_a 87657562 _zsn 86000037
022	0		_a0886-7860
035			_a(OCoLC)ocm12995536
037			_bMaterials Research Society, 9800 McKnight Rd., Suite 327, Pittsburgh, PA 15237
040			_aNSDP _cNSDP _dDLC _dNSDP _dDLC _dNST _dNSDP _dDLC _dNST _dDLC _dOCoLC
042			_ansdp _alc
050	0	0	_aTK7871.15.T85 _bW66a
082	0	0	_a621.395 _222 _bTUN
111	2		_aWorkshop on Tungsten and Other Refractory Metals for VLSI Applications. _96516
210	0		_aTungsten other refract. metals VLSI appl.
222		0	_aTungsten and other refractory metals for VLSI applications
245	1	0	_aTungsten and other refractory metals for VLSI applications 3 / _cEditor Victor A. Wells
260			_aPittsburgh, Pa : _bMaterials Research Society, _cc1988
300			_a428 p. : _bill. ; _c24 cm.
310			_aAnnual
362	0		_a[1] (1985)-
500			_aIssue for 1985 includes also proceedings of the 1984 workshop held by the Workshop under its earlier name: Workshop on Tungsten for VLSI Applications.
590			_aSERBIB/SERLOC merged record
650		0	_aIntegrated circuits _xVery large scale integration _xMaterials _vCongresses. _96517
650		0	_aTungsten _vCongresses. _96518
650		0	_aHeat resistant alloys _vCongresses. _96519
710	2		_aMaterials Research Society. _96520
711	2		_aWorkshop on Tungsten for VLSI Applications. _96521
785	0	0	_aWorkshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications. _tTungsten and other advanced metals for VLSI/ULSI applications _x1048-0854 _w(DLC) 90641076 _w(OCoLC)20850304
942			_2ddc _cBB
999			_c11914 _d11914