Tungsten and other refractory metals for VLSI applications 3 / Editor Victor A. Wells

By:

Workshop on Tungsten and Other Refractory Metals for VLSI Applications

Contributor(s):

Material type:

Continuing resourcePublication details: Pittsburgh, Pa : Materials Research Society, c1988Description: 428 p. : ill. ; 24 cmISSN:

0886-7860

Subject(s):

DDC classification:

621.395 22 TUN

LOC classification:

TK7871.15.T85 W66a

Continued by: Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications. Tungsten and other advanced metals for VLSI/ULSI applications

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Holdings
Cover image	Item type	Current library	Home library	Collection	Shelving location	Call number	Materials specified	Vol info	URL	Copy number	Status	Notes	Date due	Barcode	Item holds	Item hold queue priority	Course reserves
	Book - Borrowing	Central Library First floor		Alef-Baa		621.395 TUN (Browse shelf(Opens below))					Available			000017082

Total holds: 0

Issue for 1985 includes also proceedings of the 1984 workshop held by the Workshop under its earlier name: Workshop on Tungsten for VLSI Applications.

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