TY  - GEN
AU  - 20080729                     
AU  - Kern,Werner
TI  - Handbook of semiconductor wafer cleaning technology : science, technology, and applications
SN  - 0815513313 :
U1  - 621.38152 
PY  - 1993///
CY  - Park Ridge, N.J., U.S.A.
PB  - Noyes Publications,1993.
KW  - Semiconductor wafers
KW  - Cleaning
N1  - Distributer: Al-Ahram; Includes bibliographical references and index; Catalogued by: Sara
UR  - http://www.loc.gov/catdir/description/wap041/93004078.html
ER  -