00921nac a22002291u 4500 93004078 0815513313 : 621.38152 SEM 9409 9409 20080729 Handbook of semiconductor wafer cleaning technology : science, technology, and applications / edited by Werner Kern. Park Ridge, N.J., U.S.A. : Noyes Publications,1993. c1993. xx, 623 p. : ill. ; 25 cm. Materials science and process technology series. Distributer: Al-Ahram Includes bibliographical references and index. Catalogued by: Sara Semiconductor wafers Cleaning. Kern, Werner, 1925- Publisher description http://www.loc.gov/catdir/description/wap041/93004078.html NB 621.38152SEM 9409 9409 0 0 0 0 MAIN MAIN 1ST 2008-05-08 Purchase 0 621.38152SEM 000011066 2025-07-15 00:00:00 NB