00983nac a22002411u 4500 111027s2008 fluill |r|||| 001 0 eng d 2004057931 0849328381 (alk. paper) 9780849328381 (alk. paper) 621.381 LYS 22 Lyshevski, Sergey Edwa 27646 Nano- and Micro-Electromechanical Systems : Fundamentals of Nano- and Microengineering / Sergey Edward Lyshevski. 2nd ed. Boca Raton, Fla. : CRC Press, 2005 c2005. 722 p. : ill. ; 26 cm. 27645 Nano- and Microscience, Engineering, Technology, and Medicine Series ; 8 Includes bibliographical references and index. Microelectromechanical systems. 27647 Nanotechnology. 27648 Ele October2011 Publisher description http://www.loc.gov/catdir/enhancements/fy0647/2004057931-d.html BB 621.381LYS ddc 829 829 0 0 ddc 0 0 MAIN MAIN 1ST 2006-07-31 purchase 418.40 6 10 621.381 LYS 000003727 2025-07-15 00:00:00 2018-10-11 523.00 BB 0 0 ddc 0 0 sorazbk MAIN MAIN 1ST 2011-10-27 purchase 418.40 0 621.381 LYS 000025505 2025-07-15 00:00:00 523.00 BB