<?xml version="1.0" encoding="UTF-8"?>
<record
    xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
    xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd"
    xmlns="http://www.loc.gov/MARC21/slim">

  <leader>01499cac a22003855a 4500</leader>
  <controlfield tag="008">120612s2006    xxuadl|| |||| 001 0ceng d</controlfield>
  <datafield tag="010" ind1=" " ind2=" ">
    <subfield code="a">  2005051409</subfield>
  </datafield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">0849391393 (alk. paper)</subfield>
  </datafield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">0849321069 (set : alk. paper)</subfield>
  </datafield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">9780849391392</subfield>
  </datafield>
  <datafield tag="082" ind1="0" ind2="4">
    <subfield code="a">621.381</subfield>
    <subfield code="b">MEM</subfield>
    <subfield code="2">22</subfield>
  </datafield>
  <datafield tag="245" ind1="0" ind2="4">
    <subfield code="a">MEMS :</subfield>
    <subfield code="b">applications /</subfield>
    <subfield code="c">edited by Mohamed Gad-el-Hak.</subfield>
  </datafield>
  <datafield tag="250" ind1=" " ind2=" ">
    <subfield code="a">2nd ed.</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="a">Boca Raton, Florida :</subfield>
    <subfield code="b">CRC Press / Taylor &amp; Francis,</subfield>
    <subfield code="c">c.2006.</subfield>
  </datafield>
  <datafield tag="300" ind1=" " ind2=" ">
    <subfield code="a">1 v. (various pagings),  :</subfield>
    <subfield code="b">ill. ;</subfield>
    <subfield code="c">26 cm.</subfield>
  </datafield>
  <datafield tag="490" ind1="1" ind2=" ">
    <subfield code="a">Mechanical engineering series</subfield>
  </datafield>
  <datafield tag="490" ind1="1" ind2=" ">
    <subfield code="a">The MEMS handbook</subfield>
  </datafield>
  <datafield tag="500" ind1=" " ind2=" ">
    <subfield code="a">One of three parts whose previous edition was a published as a single volume.</subfield>
  </datafield>
  <datafield tag="500" ind1=" " ind2=" ">
    <subfield code="a">Index : p. (I1-I14). </subfield>
  </datafield>
  <datafield tag="500" ind1=" " ind2=" ">
    <subfield code="a">Distributer: Al-Ahram.</subfield>
  </datafield>
  <datafield tag="504" ind1=" " ind2=" ">
    <subfield code="a">Bibliography : p. (15-34) - (15-35). </subfield>
  </datafield>
  <datafield tag="511" ind1=" " ind2=" ">
    <subfield code="a">Catalogued By: Mahitab.</subfield>
  </datafield>
  <datafield tag="590" ind1=" " ind2=" ">
    <subfield code="a">Mustafa galal.</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Microelectromechanical systems.</subfield>
    <subfield code="9">30085</subfield>
    <subfield code="2">BUEsh</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Detectors.</subfield>
    <subfield code="9">30086</subfield>
    <subfield code="2">BUEsh</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Microactuators.</subfield>
    <subfield code="9">30087</subfield>
    <subfield code="2">BUEsh</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Robots.</subfield>
    <subfield code="9">30088</subfield>
    <subfield code="2">BUEsh</subfield>
  </datafield>
  <datafield tag="651" ind1=" " ind2=" ">
    <subfield code="2">BUEsh</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="b">COMSCI</subfield>
    <subfield code="c">August2015</subfield>
  </datafield>
  <datafield tag="700" ind1="1" ind2=" ">
    <subfield code="a">Gad-el-Hak, Mohamed,</subfield>
    <subfield code="d">1945-</subfield>
    <subfield code="9">30089</subfield>
    <subfield code="e">editor.</subfield>
  </datafield>
  <datafield tag="830" ind1=" " ind2="0">
    <subfield code="a">Mechanical engineering series (Boca Raton, Fla.)</subfield>
    <subfield code="9">30090</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2="1">
    <subfield code="3">Table of contents only</subfield>
    <subfield code="u">http://www.loc.gov/catdir/toc/fy0702/2005051409.html</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2="1">
    <subfield code="3">Publisher description</subfield>
    <subfield code="u">http://www.loc.gov/catdir/enhancements/fy0653/2005051409-d.html</subfield>
  </datafield>
  <datafield tag="942" ind1=" " ind2=" ">
    <subfield code="c">BB</subfield>
    <subfield code="k">621.381GAD</subfield>
    <subfield code="2">ddc</subfield>
  </datafield>
  <datafield tag="999" ind1=" " ind2=" ">
    <subfield code="c">8002</subfield>
    <subfield code="d">8002</subfield>
  </datafield>
  <datafield tag="952" ind1=" " ind2=" ">
    <subfield code="0">0</subfield>
    <subfield code="1">0</subfield>
    <subfield code="2">ddc</subfield>
    <subfield code="4">0</subfield>
    <subfield code="7">0</subfield>
    <subfield code="8"> </subfield>
    <subfield code="a">MAIN</subfield>
    <subfield code="b">MAIN</subfield>
    <subfield code="c">1ST</subfield>
    <subfield code="d">2008-02-18</subfield>
    <subfield code="e">purchase</subfield>
    <subfield code="l">1</subfield>
    <subfield code="m">17</subfield>
    <subfield code="o">621.381 MEM</subfield>
    <subfield code="p">000030379</subfield>
    <subfield code="r">2025-07-15 00:00:00</subfield>
    <subfield code="s">2015-10-26</subfield>
    <subfield code="y">BB</subfield>
  </datafield>
</record>
