TY  - GEN
AU  - Gad-el-Hak,Mohamed
TI  - MEMS: introduction and fundamentals 
T2  - Mechanical engineering series
SN  - 0849391377 (alk. paper)
U1  - 621.381 22
PY  - 2006///
CY  - Boca Raton
PB  - CRC/Taylor & Francis
KW  - Microelectromechanical systems
KW  - BUEsh
KW  - Microelectronics
KW  - Nanotechnology
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0653/2005050111-d.html
ER  -