00922nac a22002411u 4500 150901b xxu||||| |||| 00| 0 eng d 2005050111 0849391377 (alk. paper) 621.381 MEM 22 MEMS : introduction and fundamentals / edited by Mohamed Gad-El-Hak. Boca Raton : CRC/Taylor & Francis, 2006. 1 v. (various pagings) : ill. ; 26 cm. Mechanical engineering series Includes bibliographical references and index. Microelectromechanical systems. BUEsh Microelectronics. BUEsh Nanotechnology. BUEsh BUEsh Gad-el-Hak, Mohamed, 1945- Mechanical engineering series (Boca Raton, Fla.) Publisher description http://www.loc.gov/catdir/enhancements/fy0653/2005050111-d.html BB 621.381 ddc 8001 1982 0 0 0 0 MAIN MAIN 1ST 2006-02-07 Purchase 562.40 3 8 621.381 MEM 000002425 2025-07-15 00:00:00 2013-11-07 260.00 BB 0 0 ddc 0 0 MAIN MAIN 1ST 2008-02-18 purchase 562.40 1 5 621.381 MEM 000009416 2025-07-15 00:00:00 2014-12-04 260.00 BB