01204cac a22003135a 4500 20150805110117.0 110220t2006 -usa|||fr|||| 001 0 eng d 2005050109 0849391385 (alk. paper) 9780849391385 EG-ScBUE eng EG-ScBUE 621.381 MEM 22 MEMS : design and fabrication / edited by Mohamed Gad-el-Hak. 2nd ed. Boca Raton, Florida : CRC/Taylor & Francis, c.2006. [various pagings] : ill., photos ; 26 cm. Mechanical engineering series Index : I1- I17. Includes bibliographical references. yassmeen ashraf Microelectromechanical systems Design and construction. 22247 BUEsh Microfabrication. 22248 BUEsh BUEsh ENGGEN August2015 Mechanical engineering series (Boca Raton, Fla.) 22250 Table of contents only http://www.loc.gov/catdir/toc/fy0702/2005050109.html Publisher description http://www.loc.gov/catdir/enhancements/fy0668/2005050109-d.html BB 621.381MEM ddc 8000 1924 0 0 ddc 0 0 MAIN MAIN 1ST 2011-02-20 purchase 2 2 621.381 MEM 000030378 2025-07-15 00:00:00 2018-10-11 560.40 BB 0 0 ddc 0 0 MAIN MAIN 1ST 2008-02-18 purchase 3 20 621.381 MEM 000030377 2025-07-15 00:00:00 2015-10-26 BB