00943nac a22002171u 4500 7969 090203t2006 xxu||||| |||| 00| 0 eng d 2005048932 0131472860 (OCoLC)ocm60550857 621.3 LIU Liu, Chang, Foundations of MEMS / Chang Liu. Upper Saddle River, NJ : Pearson/Prentice Hall, c2006. xxii, 530 p. : ill. ; 25 cm. Includes bibliographical references and index. Microelectromechanical systems. BB 621.3LIU ddc 7969 7969 0 0 ddc 0 0 Alahram MAIN MAIN 1ST 2014-02-08 purchase 2 26 621.3 LIU 000009723 2025-07-15 00:00:00 2015-10-26 BB 0 0 ddc 0 0 Alahram MAIN MAIN 1ST 2009-02-03 purchase 228.50 6459 1 2 621.3 LIU 000014491 2025-07-15 00:00:00 2018-10-11 BB