TY  - GEN
AU  - Hitchman, Michael L.         
AU  - Hitchman, Michael L.
AU  - Jensen, Klavs F.
TI  - Chemical vapor deposition
SN  - 0123496705
U1  - 671.735 
PY  - 1993///
CY  - London
PB  - Academic Press,c.1993.
KW  - Chemical vapor deposition
KW  - Plating
N1  - Distributer: Al-Ahram; Catalogued By: Mahitab
ER  -