01220nac a22003011u 4500 97026052 0471966819 (v. 1 : alk. paper) 0471966827 (v. 2 : alk. paper) 0471980846 (set : alk. paper) (DLC) 97026052 621.38152 CAM 6703 6703 Campbell, S.A. [ed.] Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz. Chichester, England ; New York : Wiley, c1998. c1998. 2 v. : ill. ; 24 cm. Distributer: Al-Ahram. Includes bibliographical references and index. v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications. Catalogued By: Mahitab. Semiconductors Design and construction. Micromachining. Microfabrication. Lewerenz, H.- J. Publisher description http://www.loc.gov/catdir/description/wiley033/97026052.html Table of Contents http://www.loc.gov/catdir/toc/onix03/97026052.html BB 621.38152CAM 6703 6703 0 0 0 0 MAIN MAIN 1ST 2007-11-29 Purchase 0 621.38152CAM 000008027 2025-07-15 00:00:00 BB