01898nam a2200385 i 4500 020208825 EG-ScBUE 20230213025032.0 210526t2021 nyua f b 001 0 eng d 9781264257584 1264257589 StDuBDS eng rda StDuBDS Uk EG-ScBUE 621.381 22 KIM Kim, Eun Sok, author. Fundamentals of microelectromechanical systems (MEMS) / Eun Sok Kim. Microelectromechanical systems (MEMS) New York : McGraw-Hill, [2021] ©2021 xviii, 396 pages : illustrations (black and white) ; 25 cm text rdacontent txt still image rdacontent txt unmediated rdamedia n volume rdacarrier nc Includes bibliographical references and index. This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and problems for the students? homework and exams for the sake of in-depth understanding of MEMS as well as problem-solving and/or design skills in MEMS analysis and design. Microelectromechanical systems. BUEsh Semiconductors Design and construction Computer network resources. BUEsh Integrated circuits Design and construction Computer network resources. BUEsh Semiconductors Materials Computer network resources. BUEsh Integrated circuits Reliability Computer network resources. BUEsh ENGGEN February2023 Reading book ddc BB 30133 30104 0 0 ddc 0 0 Baccah MAIN MAIN 1ST 2023-02-13 Purchase 2981.00 3726.25 0 621.381 KIM 000044761 2025-07-15 00:00:00 37171.00 2023-02-13 BB