TY - BOOK AU - Kaltenbacher,Manfred TI - Numerical simulation of mechatronic sensors and actuators SN - 354020458X (alk. paper) U1 - 621.3 22 PY - 2004///] CY - New York PB - Springer KW - Microelectromechanical systems KW - BUEsh KW - Mechatronics KW - GGEN KW - July2020 KW - Reading book N1 - Includes bibliographical references and index UR - http://www.loc.gov/catdir/enhancements/fy0812/2004045237-d.html UR - http://www.loc.gov/catdir/enhancements/fy0812/2004045237-t.html ER -