01425cam a22002895a 4500 1107870 20171224114918.0 930816s1994 dcua frb f101 0 eng d 0841227217 DLC DLC DLC EG-ScBUE eng 621.381531 22 POL Polymers for microelectronics : resists and dielectrics / editors Larry F. Thompson, C. Grant Willson, Seiichi Tagawa. Washington : American Chemical Society, 1994. xii, 571 p. : ill. ; 24 cm. "Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992." Includes bibliographical references and indexes. Microelectronics Materials Congresses. BUEsh Polymers Congresses. BUEsh BUEsh GGEN December2017 Thompson, L. F., 1944- editor. Willson, C. G. (C. Grant) 1939- editor. Tagawa, Seiichi, editor. American Chemical Society. Division of Polymeric Materials: Science and Engineering. 7424 American Chemical Society. Meeting (203rd : 1992 : San Francisco, Calif.) ddc 25777 25749 0 0 ddc 0 0 MAIN MAIN 1ST 2017-12-24 0 621.381531 POL 000046983 2025-07-15 00:00:00 BB