00710nac a22002051u 4500010001400000020001500014028002000029082002300049090001500072100003400087245003200121246001000153260007800163300003300241490003300274600003300307942001900340999001500359952013000374  a010354907  a0863413358  bcatlaogue.bl.uk  a621.381 22bH85972  c1978d1978  atai-ran husu                   amems packagingchsu,tai-ran  hpaper  aukbinspec:the institution of electrical engineers , united kingdomc1988  axxix, 275 p. : ill. ; 26 cm.  aemis processing seriesvno.3  atai-ran hsutmmems packaging  cBBk621.381 22  c1978d1978  00104070aMAINbMAINc1STd2006-02-07ePurchasel2m19o621.381 TAIp000002374r2025-07-15 00:00:00s2016-06-12v855.50yBB