00966nam a22002537a 4500 20120219165115.0 120219s2012 nju|||||r|||| 001 0 eng d 0273752243 9780273752240 22 621.3 LIU 29008 Liu, Chang Foundations of MEMS / Chang Liu. 2nd ed. / international edition contributions by Vaishali B. Mungurwadi, Anil V. Nandi. Upper Saddle River : Prentice Hall, c2012. 576 p. : ill ; 23 cm. "International edition". Includes bibliographical references and index. 27647 Microelectromechanical systems. Mec February2012 29009 Mungurwadi, Vaishali B. 29010 Nandi, Anil V. ddc BB 16490 16490 0 0 ddc 0 0 Alahram MAIN MAIN 1ST 2012-02-19 purchase 199.00 681 2 13 621.3 LIU 000026148 2025-07-15 00:00:00 2018-09-24 BB