01908cas a2200385 a 45000010009000000050017000090080041000260100031000670220014000980350024001120370083001360400064002190420013002830500024002960820021003201110082003412100046004232220063004692450091005322600057006233000029006803100011007093620016007205000155007365900032008916500084009236500032010076500045010397100038010847110054011227850188011769420012013649990017013769520129013931133415720040118185306.0860109d198619uupauar1p       1   a0eng d  a   87657562 zsn 86000037 0 a0886-7860  a(OCoLC)ocm12995536   bMaterials Research Society, 9800 McKnight Rd., Suite 327, Pittsburgh, PA 15237  aNSDPcNSDPdDLCdNSDPdDLCdNSTdNSDPdDLCdNSTdDLCdOCoLC  ansdpalc00aTK7871.15.T85bW66a00a621.395222bTUN2 aWorkshop on Tungsten and Other Refractory Metals for VLSI Applications.965160 aTungsten other refract. metals VLSI appl. 0aTungsten and other refractory metals for VLSI applications10aTungsten and other refractory metals for VLSI applications 3 /cEditor Victor A. Wells  aPittsburgh, Pa :bMaterials Research Society,cc1988  a428 p. :bill. ;c24 cm.  aAnnual0 a[1] (1985)-  aIssue for 1985 includes also proceedings of the 1984 workshop held by the Workshop under its earlier name: Workshop on Tungsten for VLSI Applications.  aSERBIB/SERLOC merged record 0aIntegrated circuitsxVery large scale integrationxMaterialsvCongresses.96517 0aTungstenvCongresses.96518 0aHeat resistant alloysvCongresses.965192 aMaterials Research Society.965202 aWorkshop on Tungsten for VLSI Applications.9652100aWorkshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications.tTungsten and other advanced metals for VLSI/ULSI applicationsx1048-0854w(DLC)   90641076w(OCoLC)20850304  2ddccBB  c11914d11914  00102ddc40708Alef-BaaaMAINbMAINc1STd2009-06-21epurchaseg150.00l0o621.395 TUNp000017082r2025-07-15 00:00:00yBB