TY  - SER
ED  - Workshop on Tungsten and Other Refractory Metals for VLSI Applications.
ED  - Materials Research Society.
ED  - Workshop on Tungsten for VLSI Applications.
TI  - Tungsten and other refractory metals for VLSI applications 3
SN  - 0886-7860
AV  - TK7871.15.T85 W66a
U1  - 621.395 22
PY  - 1988///
CY  - Pittsburgh, Pa
PB  - Materials Research Society
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Materials
KW  - Congresses
KW  - Tungsten
KW  - Heat resistant alloys
N1  - Issue for 1985 includes also proceedings of the 1984 workshop held by the Workshop under its earlier name: Workshop on Tungsten for VLSI Applications
ER  -