01965cas a2200397 a 4500 11334157 20040118185306.0 860109d198619uupauar1p 1 a0eng d 87657562 sn 86000037 0886-7860 (OCoLC)ocm12995536 Materials Research Society, 9800 McKnight Rd., Suite 327, Pittsburgh, PA 15237 NSDP NSDP DLC NSDP DLC NST NSDP DLC NST DLC OCoLC nsdp lc TK7871.15.T85 W66a 621.395 22 TUN Workshop on Tungsten and Other Refractory Metals for VLSI Applications. 6516 Tungsten other refract. metals VLSI appl. Tungsten and other refractory metals for VLSI applications Tungsten and other refractory metals for VLSI applications 3 / Editor Victor A. Wells Pittsburgh, Pa : Materials Research Society, c1988 428 p. : ill. ; 24 cm. Annual [1] (1985)- Issue for 1985 includes also proceedings of the 1984 workshop held by the Workshop under its earlier name: Workshop on Tungsten for VLSI Applications. SERBIB/SERLOC merged record Integrated circuits Very large scale integration Materials Congresses. 6517 Tungsten Congresses. 6518 Heat resistant alloys Congresses. 6519 Materials Research Society. 6520 Workshop on Tungsten for VLSI Applications. 6521 Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications. Tungsten and other advanced metals for VLSI/ULSI applications 1048-0854 (DLC) 90641076 (OCoLC)20850304 ddc BB 11914 11914 0 0 ddc 0 0 Alef-Baa MAIN MAIN 1ST 2009-06-21 purchase 150.00 0 621.395 TUN 000017082 2025-07-15 00:00:00 BB