Rapid thermal processing : science and technology / edited by Richard B. Fair.
Material type:
TextPublication details: San Diego : Academic Press, c.1993.Description: viii, 430 p. : ill. ; 24 cmISBN: - 0122476905 (acid-free paper)
- 621.38152 RAP 22
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| 621.38152 PEA Hydrogen in crystalline semiconductors / | 621.38152 RAO Introduction to Semiconductor devices/ | 621.38152 RAP Rapid thermal processing : | 621.38152 RAP Rapid thermal processing : | 621.38152 SHA Sold State Devices and Ciruits / | 621.38152 SIL Silicon wafer bonding technology : for VLSI and MEMS applications / | 621.38152 STR Solid State Electronic Devices / |
Index : p. 425-430.
Includes bibliographical references.
Menna Elemam
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