Fundamentals of microelectromechanical systems (MEMS) / Eun Sok Kim.
Material type:
TextPublisher: New York : McGraw-Hill, [2021]Copyright date: ©2021Description: xviii, 396 pages : illustrations (black and white) ; 25 cmContent type: - text
- still image
- unmediated
- volume
- 9781264257584
- 1264257589
- Microelectromechanical systems (MEMS)
- Microelectromechanical systems
- Semiconductors -- Design and construction -- Computer network resources
- Integrated circuits -- Design and construction -- Computer network resources
- Semiconductors -- Materials -- Computer network resources
- Integrated circuits -- Reliability -- Computer network resources
- Engineering, General February2023
- 621.381 22 KIM
| Cover image | Item type | Current library | Home library | Collection | Shelving location | Call number | Materials specified | Vol info | URL | Copy number | Status | Notes | Date due | Barcode | Item holds | Item hold queue priority | Course reserves | |
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Book - Borrowing
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Central Library First floor | Baccah | 621.381 KIM (Browse shelf(Opens below)) | 3726.25 | Available | 000044761 |
Includes bibliographical references and index.
This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and problems for the students? homework and exams for the sake of in-depth understanding of MEMS as well as problem-solving and/or design skills in MEMS analysis and design.
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