MEMS :

MEMS : introduction and fundamentals / edited by Mohamed Gad-El-Hak. - Boca Raton : CRC/Taylor & Francis, 2006. - 1 v. (various pagings) : ill. ; 26 cm. - Mechanical engineering series . - Mechanical engineering series (Boca Raton, Fla.) .

Includes bibliographical references and index.

0849391377 (alk. paper)

2005050111


Microelectromechanical systems.
Microelectronics.
Nanotechnology.



621.381 / MEM

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